Investigation the effect of operating conditions on Te and ne of Argon plasma glow discharge at cathode graphite

Abstract

In this study, the spectral analysis technique was used to calculate the electron temperature and density of argon gas using the ratio method between the two spectral lines. These parameters were calculated at different pressures (0.375, 0.75, 1.5, 1.875, 2.25 torr) and voltages (240, 250, 260, 270, 280 volt). The results showed that the temperature of the electron increases by increasing the voltage and decreases with increasing pressure, while the density of the electrons increases by increasing the voltage and the pressure.  where the temperature of the electrons was calculated  and it was at the limitations of (0.28 - 0.54eV), As for the density of electrons was at the limitations of (1.5 × 10¹² - 3.7 × 10¹² cm ^{– 3}) .